Thermal Chemical Vapor Deposition

doi:10.1007/978-90-481-9751-4_100830

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Ohio Eminent Scholar and The Howard D. Winbigler Professor, Director, Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2), Ohio State University, 201 W. 19th Avenue, Columbus, Ohio, 43210-1142, USA
Bharat Bhushan

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(2012). Thermal Chemical Vapor Deposition. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9751-4_100830

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DOI: https://doi.org/10.1007/978-90-481-9751-4_100830
Publisher Name: Springer, Dordrecht
Print ISBN: 978-90-481-9750-7
Online ISBN: 978-90-481-9751-4
eBook Packages: Chemistry and Materials ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics

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