Abstract
Rarefied gas dynamics, which has been explored for more than a century, studies device being considered. Traditionally, it has been used to study high-speed highaltitude flow applications, such as space re-entry vehicles, and flows under ultra-low pressure (vacuum) conditions, where ??has a large value. However, recent technological developments have enabled major advances in fabricating miniaturized devices such as micro-electro-mechanical systems (MEMS). Gas flow in micro-scale devices can suffer from rarefaction effects because the characteristic length of the device is so small that it is comparable to the mean free path of the gas, even under atmospheric conditions.
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Gu, X., Emerson, D. (2009). New approaches to modeling rarefied gas flow in the slip and transition regime. In: Parallel Computational Fluid Dynamics 2007. Lecture Notes in Computational Science and Engineering, vol 67. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-92744-0_4
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DOI: https://doi.org/10.1007/978-3-540-92744-0_4
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