Laser-Induced Periodic Surface Structures (LIPSS)

Bonse, Jörn; Kirner, Sabrina V.; Krüger, Jörg

doi:10.1007/978-3-319-69537-2_17-2

Jörn Bonse²,
Sabrina V. Kirner² &
Jörg Krüger²

1213 Accesses
7 Citations

Abstract

Laser-induced periodic surface structures (LIPSS) are a universal phenomenon and can be generated on almost any material by irradiation with linearly polarized radiation. This chapter reviews the current state in the field of LIPSS, which are formed in a “self-ordered” way and are often accompanying materials processing applications. LIPSS can be produced in a single-stage process and enable surface nanostructuring and, in turn, adaption of optical, mechanical, and chemical surface properties. Typically, they feature a structural size ranging from several micrometers down to less than 100 nm and show a clear correlation with the polarization direction of the light used for their generation. Various types of LIPSS are classified, relevant control parameters are identified, and their material-specific formation mechanisms are analyzed for different types of inorganic solids, i.e., metals, semiconductors, and dielectrics. Finally, technological applications featuring surface functionalization in the fields of optics, fluidics, medicine, and tribology are discussed.

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References

Abere MJ, Torralva B, Yalisove SM (2016a) Periodic surface structure bifurcation induced by ultrafast laser generated point defect diffusion in GaAs. Appl Phys Lett 108:153110. https://doi.org/10.1063/1.4946861
Article ADS Google Scholar
Abere MJ, Zhong ML, Krüger J, Bonse J (2016b) Ultrafast laser-induced morphological transformations. MRS Bull 41:969–974. https://doi.org/10.1557/mrs.2016.271
Article Google Scholar
Ahmmed KMT, Grambow C, Kietzig AM (2014) Fabrication of micro/nano structures on metals by femtosecond laser micromachining. Micromachines 5:1219–1253. https://doi.org/10.3390/mi5041219
Article Google Scholar
Akhmanov SA, Emel’yanov VI, Koroteev NI, Seminogov VN (1985) Interaction of powerful laser radiation with the surfaces of semiconductors and metals: nonlinear optical effects and nonlinear optical diagnostics. Sov Phys Usp 28:1084–1124. https://doi.org/10.1070/PU1985v028n12ABEH003986
Article ADS Google Scholar
Albu C, Dinescu A, Filipescu M, Ulmeanu M, Zamfirescu M (2013) Periodical structures induced by femtosecond laser on metals in air and liquid environments. Appl Surf Sci 278:347–351. https://doi.org/10.1016/j.apsusc.2012.11.075
Article ADS Google Scholar
Ali N, Bashir S, Umm-i-Kalsoom, Rafique MS, Begum N, Husinsky W (2017) Nanostructuring of zirconium by femtosecond laser irradiation in the ambient environment of air and ethanol. Optik 134:149–160. https://doi.org/10.1016/j.ijleo.2017.01.021
Article ADS Google Scholar
Azarm A, Akhoundi F, Norwood RA, Peyghambarian N, Kieu K (2018) Femtosecond laser-induced melting and shaping of indium nanostructures on silicon wafers. Appl Phys Lett 113:033103. https://doi.org/10.1063/1.5026707
Article ADS Google Scholar
Barberoglou M, Gray D, Magoulakis E, Fotakis C, Loukakos PA, Stratakis E (2013) Controlling ripples’ periodicity using temporally delayed femtosecond laser double pulses. Opt Express 21:18501–18508. https://doi.org/10.1364/OE.21.018501
Article ADS Google Scholar
Barnes WL, Dereux A, Ebbesen TW (2003) Surface plasmon subwavelength optics. Nature 424:824–830. https://doi.org/10.1038/nature01937
Article ADS Google Scholar
Bashir S, Rafique MS, Husinsky W (2012) Femtosecond laser-induced subwavelength ripples on Al, Si, CaF₂ and CR-39. Nucl Inst Methods Phys Res B 275:1–6. https://doi.org/10.1016/j.nimb.2011.12.016
Article ADS Google Scholar
Baudach S, Bonse J, Kautek W (1999) Ablation experiments on polyimide with femtosecond laser pulses. Appl Phys A 69(Suppl):S395–S398. https://doi.org/10.1007/s003399900276
Article ADS Google Scholar
Bäuerle D (2011) Laser processing and chemistry, 4th edn. Springer, Berlin
Book Google Scholar
Birnbaum M (1965) Semiconductor surface damage produced by ruby lasers. J Appl Phys 36:3688–3689. https://doi.org/10.1063/1.1703071
Article ADS MathSciNet Google Scholar
Bonch-Bruevich AM, Libenson MN, Makin VS, Trubaev VV (1992) Surface electromagnetic waves in optics. Opt Eng 31:718–730. https://doi.org/10.1117/12.56133
Article ADS Google Scholar
Bonse J, Baudach S, Krüger J, Kautek, W, Lenzner M (2002) Femtosecond laser ablation of silicon – modification thresholds and morphology. Appl Phys A 74:19–25. https://doi.org/10.1007/s003390100893
Bonse J, Krüger J (2010) Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon. J Appl Phys 108:034903. https://doi.org/10.1063/1.3456501
Article ADS Google Scholar
Bonse J, Munz M, Sturm H (2005) Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses. J Appl Phys 97:013538. https://doi.org/10.1063/1.1827919
Article ADS Google Scholar
Bonse J, Rosenfeld A, Krüger J (2009) On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses. J Appl Phys 106:104910. https://doi.org/10.1063/1.3261734
Article ADS Google Scholar
Bonse J, Rosenfeld A, Krüger J (2011) Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures. Appl Surf Sci 257:5420–5423. https://doi.org/10.1016/j.apsusc.2010.11.059
Article ADS Google Scholar
Bonse J, Krüger J, Höhm S, Rosenfeld A (2012) Femtosecond laser-induced periodic surface structures. J Laser Appl 24:042006. https://doi.org/10.2351/1.4712658
Article Google Scholar
Bonse J, Höhm S, Rosenfeld A, Krüger J (2013) Sub-100-nm laser-induced periodic surface structures upon irradiation of titanium by Ti:Sapphire femtosecond laser pulses in air. Appl Phys A 110:547–551. https://doi.org/10.1007/s00339-012-7140-y
Article ADS Google Scholar
Bonse J, Koter R, Hartelt M, Spaltmann D, Pentzien S, Höhm S, Rosenfeld A, Krüger J (2014) Femtosecond laser-induced periodic surface structures on steel and titanium alloy for tribological applications. Appl Phys A 117:103–110. https://doi.org/10.1007/s00339-014-8229-2
Article ADS Google Scholar
Bonse J, Koter R, Hartelt M, Spaltmann D, Pentzien S, Höhm S, Rosenfeld A, Krüger J (2015) Tribological performance of femtosecond laser-induced periodic surface structures on titanium and a high toughness bearing steel. Appl Surf Sci 336:21–27. https://doi.org/10.1016/j.apsusc.2014.08.111
Article ADS Google Scholar
Bonse J, Höhm S, Kirner SV, Rosenfeld A, Krüger J (2017a) Laser-induced periodic surface structures – a scientific evergreen. IEEE J Sel Top Quantum Electron 23:9000615. https://doi.org/10.1109/JSTQE.2016.2614183
Article Google Scholar
Bonse J, Kirner SV, Höhm S, Epperlein N, Spaltmann D, Rosenfeld A, Krüger J (2017b) Applications of laser-induced periodic surface structures (LIPSS). Proc SPIE 10092:100920N. https://doi.org/10.1117/12.2250919
Article Google Scholar
Bonse J, Kirner SV, Griepentrog M, Spaltmann D, Krüger J (2018) Femtosecond laser texturing of surfaces for tribological applications. Materials (Basel, Switzerland) 11:801. https://doi.org/10.3390/ma11050801
Article ADS Google Scholar
Borowiec A, Haugen HK (2003) Subwavelength ripple formation on the surfaces of compound semiconductors irradiated with femtosecond laser pulses. Appl Phys Lett 82:4462–4464. https://doi.org/10.1063/1.1586457
Article ADS Google Scholar
Buividas R, Mikutis M, Juodkazis S (2014) Surface and bulk structuring of materials by ripples with long and short laser pulses: recent advances. Prog Quantum Electron 38:119–156. https://doi.org/10.1016/j.pquantelec.2014.03.002
Article ADS Google Scholar
Cangueiro LT (2017) Ultrafast laser tissue cutting and removal for applications in orthopaedic surgery. Dissertation, Universidade de Lisboa. https://doi.org/10.13140/RG.2.2.33846.80969
Cangueiro LT, Cavaleiro AJ, Morgiel J, Vilar R (2016) Mechanisms of the formation of low spatial frequency LIPSS on Ni/Ti reactive multilayers. J Phys D 49:365103. https://doi.org/10.1088/0022-3727/49/36/365103
Article Google Scholar
Chakravarty U, Ganeev RA, Naik PA, Chakera JA, Babu M, Gupta PD (2011) Nano-ripple formation on different band-gap semiconductor surfaces using femtosecond pulses. J Appl Phys 109:084347. https://doi.org/10.1063/1.3580329
Article ADS Google Scholar
Chen CY, Chung CJ, Wu BH, Li WL, Chien CW, Wu PH, Cheng CW (2012) Microstructure and lubricating property of ultra-fast laser pulse textured silicon carbide seals. Appl Phys A 107:345–350. https://doi.org/10.1007/s00339-012-6822-9
Article ADS Google Scholar
Chen T, Yang H, Zhao E, Qian J, Hao J, Han J, Tang W, Zhu H (2014) Laser-induced nanostructures on the zinc surface. J Russ Laser Res 35:561–569. https://doi.org/10.1007/s10946-014-9463-y
Article Google Scholar
Cheng CW, Shen WC, Lin CY, Lee YJ, Chen JS (2010) Fabrication of micro/nano crystalline ITO structures by femtosecond laser pulses. Appl Phys A 101:243–248. https://doi.org/10.1007/s00339-010-5810-1
Article ADS Google Scholar
Costache F, Kouteva-Arguirova S, Reif J (2004) Sub-damage-threshold femtosecond laser ablation from crystalline Si: surface nanostructures and phase transformation. Appl Phys A 79: 1429–1432. https://doi.org/10.1007/s00339-004-2803-y
Article ADS Google Scholar
Crawford THR, Botton GA, Haugen HK (2010) Crystalline orientation effects on conical structure formation in femtosecond laser irradiation of silicon and germanium. Appl Surf Sci 256:1749–1755. https://doi.org/10.1016/j.apsusc.2009.09.107
Article ADS Google Scholar
Cunha A, Elie AM, Plawinski L, Serrod AP, Botelho do Rego AM, Almeida A, Urdaci MC, Durrieu MC, Vilar R (2016) Femtosecond laser surface texturing of titanium as a method to reduce the adhesion of Staphylococcus aureus and biofilm formation. Appl Surf Sci 360:485–493. https://doi.org/10.1016/j.apsusc.2015.10.102
Article ADS Google Scholar
Das SK, Dufft D, Rosenfeld A, Bonse J, Bock M, Grunwald R (2009) Femtosecond-laser-induced quasiperiodic nanostructures on TiO₂ surfaces. J Appl Phys 105:084912. https://doi.org/10.1063/1.3117509
Article ADS Google Scholar
Deng G, Feng G, Zhou S (2017) Experimental and FDTD study of silicon surface morphology induced by femtosecond laser irradiation at a high substrate temperature. Opt Express 25:7818–7827. https://doi.org/10.1364/OE.25.007818
Article ADS Google Scholar
Derrien TJY, Torres R, Sarnet T, Sentis M, Itina TE (2012) Formation of femtosecond laser induced surface structures on silicon: insights from numerical modeling and single pulse experiments. Appl Surf Sci 258:9487–9490. https://doi.org/10.1016/j.apsusc.2011.10.084
Article ADS Google Scholar
Derrien TJY, Koter R, Krüger J, Höhm S, Rosenfeld A, Bonse J (2014a) Plasmonic formation mechanism of periodic 100-nm-structures upon femtosecond laser irradiation of silicon in water. J Appl Phys 116:074902. https://doi.org/10.1063/1.4887808
Article ADS Google Scholar
Derrien TJY, Krüger J, Itina TE, Höhm S, Rosenfeld A, Bonse J (2014b) Rippled area formed by surface plasmon polaritons upon femtosecond laser double-pulse irradiation of silicon: the role of carrier generation and relaxation processes. Appl Phys A 117:77–81. https://doi.org/10.1007/s00339-013-8205-2
Article ADS Google Scholar
Derrien TJY, Krüger J, Bonse J (2016) Properties of surface plasmon polaritons on lossy materials: lifetimes, periods and excitation conditions. J Opt 18:115007. https://doi.org/10.1088/2040-8978/18/11/115007
Article ADS Google Scholar
Déziel JL, Dumont J, Gagnon D, Dubé LJ, Messaddeq SH, Messaddeq Y (2015) Toward the formation of crossed laser-induced periodic surface structures. J Opt 17:075405. https://doi.org/10.1088/2040-8978/17/7/075405
Article ADS Google Scholar
Dorronsoro C, Bonse J, Siegel J (2013) Self-assembly of a new type of periodic surface structure in a copolymer by excimer laser irradiation above the ablation threshold. J Appl Phys 114:153105. https://doi.org/10.1063/1.4825128
Article ADS Google Scholar
Dostovalov AV,·Korolkov VP,·Babin SA (2017) Formation of thermochemical laser-induced periodic surface structures on Ti films by a femtosecond IR Gaussian beam: regimes, limiting factors, and optical properties. Appl Phys B 123:30. https://doi.org/10.1007/s00340-016-6600-z
Article ADS Google Scholar
Dufft D, Rosenfeld A, Das SK, Grunwald R, Bonse J (2009) Femtosecond laser-induced periodic surface structures revisited: a comparative study on ZnO. J Appl Phys 105:034908. https://doi.org/10.1063/1.3074106
Article ADS Google Scholar
Dusser B, Sagan Z, Soder H, Faure N, Colombier JP, Jourlin M, Audouard E (2010) Controlled nanostructures formation by ultra fast laser pulses for color marking. Opt Express 18:2913–2924. https://doi.org/10.1364/OE.18.002913
Article ADS Google Scholar
Emel’yanov VI (2008) Self-organization of ordered nano- and microstructures on the semiconductor surface under the action of laser radiation. Laser Phys 18:682–718. https://doi.org/10.1134/S1054660X08060029
Article ADS Google Scholar
Emmony DC, Howson RP, Willis LJ (1973) Laser mirror damage in germanium at 10.6 μm. Appl Phys Lett 23:598–600. https://doi.org/10.1063/1.1654761
Epperlein N, Menzel F, Schwibbert K, Koter R, Bonse J, Sameith J, Krüger J, Toepel J (2017) Influence of femtosecond laser produced nanostructures on biofilm growth on steel. Appl Surf Sci 418:420–424. https://doi.org/10.1016/j.apsusc.2017.02.174
Article ADS Google Scholar
Fauchet PM, Siegman AE (1982) Surface ripples on silicon and gallium arsenide under picosecond laser illumination. Appl Phys Lett 40:824–826. https://doi.org/10.1063/1.93274
Article ADS Google Scholar
Fuentes-Edfuf Y, Garcia-Lechuga M, Puerto D, Florian C, Garcia-Leis A, Sanchez-Cortes S, Solis J, Siegel J (2017) Coherent scatter-controlled phase change grating structures in silicon using femtosecond laser pulses. Sci Rep 7:4594. https://doi.org/10.1038/s41598-017-04891-3
Article ADS Google Scholar
Füle M, Gárdián A, Budai J, Tóth Z (2015) Comparative study of the surface nanostructure formation on different surfaces generated by low number of fs laser pulses. J Laser Micro Nanoeng 10:74–80. https://doi.org/10.2961/jlmn.2015.01.0014
Article Google Scholar
Garcia-Lechuga M, Puerto D, Fuentes-Edfuf Y, Solis J, Siegel J (2016) Ultrafast moving-spot microscopy: birth and growth of laser-induced periodic surface structures. ACS Photonics 3:1961–1967. https://doi.org/10.1021/acsphotonics.6b00514
Article Google Scholar
Garrelie F, Colombier JP, Pigeon F, Tonchev S, Faure N, Bounhalli M, Reynaud S, Parriaux O (2011) Evidence of surface plasmon resonance in ultrafast laser-induced ripples. Opt Express 19:9035–9043. https://doi.org/10.1364/OE.19.009035
Article ADS Google Scholar
Gedvilas M, Račiukaitis G, Kučikas V, Regelskis K (2012) Driving forces for self-organization in thin metal films during their partial ablation with a cylindrically focused laser beam. AIP Conf Proc 1464:229–243. https://doi.org/10.1063/1.4739877
Article ADS Google Scholar
Gemini L, Hashida M, Shimizu M, Miyasaka Y, Inoue S, Tokita S, Limpouch J, Mocek T, Sakabe S (2013) Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses. J Appl Phys 113:194903. https://doi.org/10.1063/1.4832829
Article ADS Google Scholar
Gesuele F, Nivas JJJ, Fittipaldi R, Altucci C, Bruzzese R,·Maddalena P, Amoruso S (2018) Multi-imaging analysis of nascent surface structures generated during femtosecond laser irradiation of silicon in high vacuum. Appl Phys A 124:204. https://doi.org/10.1007/s00339-018-1633-2
Article ADS Google Scholar
Gnilitskyi I, Derrien TJY, Levy Y, Bulgakova NM, Mocek T, Orazi L (2017) High-speed manufacturing of highly regular femtosecond laser-induced periodic surface structures: physical origin of regularity. Sci Rep 7:8485. https://doi.org/10.1038/s41598-017-08788-z
Article ADS Google Scholar
Golosov EV, Ionin AA, Kolobov YR, Kudryashov SI, Ligachev AE, Makarov SV, Novoselov YN, Seleznev LV, Sinitsyn DV (2011) Formation of periodic nanostructures on aluminum surface by femtosecond laser pulses. Nanotechnol Russ 6:237–243. https://doi.org/10.1134/S199507801102008X
Article Google Scholar
Goutaland F, Colombier JP, Sow MC, Ollier N, Vocanson F (2013) Laser-induced periodic alignment of Ag nanoparticles in soda-lime glass. Opt Express 21:31789–31799. https://doi.org/10.1364/OE.21.031789
Article ADS Google Scholar
Gräf S, Kunz C, Engel S, Derrien TJY, Müller FA (2018) Femtosecond laser-induced periodic surface structures on fused silica: the impact of the initial substrate temperature. Materials (Basel, Switzerland) 11:1340. https://doi.org/10.3390/ma11081340
Article ADS Google Scholar
Gu H, Dai Y, Wang H, Yan X, Ma G (2017) Effect of scanning velocity on femtosecond laser-induced periodic surface structures on HgCdTe crystal. Appl Surf Sci 425:307–313. https://doi.org/10.1016/j.apsusc.2017.06.311
Article ADS Google Scholar
Guan YC, Zhou W, Li ZL, Zheng HY, Lim GC, Hong MH (2014) Femtosecond laser-induced ripple structures on magnesium. Appl Phys A 115:13–18. https://doi.org/10.1007/s00339-013-7927-5
Article ADS Google Scholar
Gurevich EL (2016) Mechanisms of femtosecond LIPSS formation induced by periodic surface temperature modulation. Appl Surf Sci 374:56–60. https://doi.org/10.1016/j.apsusc.2015.09.091
Article ADS Google Scholar
Han Y, Zhao X, Qu S (2011) Polarization dependent ripples induced by femtosecond laser on dense flint (ZF6) glass. Opt Express 19:19150–19155. https://doi.org/10.1364/OE.19.019150
Article ADS Google Scholar
Heckl OH, Kleinbauer J, Bauer D, Weiler S, Metzger T, Sutter DH (2016) Ultrafast thin-disk lasers. In: Nolte S, Schrempel F, Dausinger F (eds) Ultrashort pulse laser technology. Springer series in optical sciences, vol 195. Springer, Cham, pp 93–115. https://doi.org/10.1007/978-3-319-17659-8_5
Chapter Google Scholar
Heitz J, Arenholz E, Bäuerle D, Sauerbrey R, Phillips HM (1994) Femtosecond excimer-laser-induced structure formation on polymers. Appl Phys A 59:289–293. https://doi.org/10.1007/BF00348232
Article ADS Google Scholar
Hendrikson W, Masman-Bakker W, van Bochove B, Skolski J, Eichstädt J, Koopman B, van Blitterswijk C, Grijpma D, Römer G, Moroni L, Rouwkema J (2016) Mold-based application of laser-induced periodic surface structures (LIPSS) on biomaterials for nanoscale patterning. Macromol Biosci 16:43–49. https://doi.org/10.1002/mabi.201500270
Article Google Scholar
Her TH (2011) Femtosecond-laser-induced periodic self-organized nanostructures. In: Andrews D, Scholes G, Wiederrecht G (eds) Comprehensive nanoscience and technology: nanofabrication and devices, vol 4. Elsevier, Amsterdam, pp 277–314. https://doi.org/10.1016/B978-0-12-374396-1.00130-6
Chapter Google Scholar
Höhm S, Rosenfeld A, Krüger J, Bonse J (2012) Femtosecond laser-induced periodic surface structures on silica. J Appl Phys 112:014901. https://doi.org/10.1063/1.4730902
Article ADS Google Scholar
Höhm S, Herzlieb M, Rosenfeld A, Krüger J, Bonse J (2013a) Formation of laser-induced periodic surface structures on fused silica upon two-color double-pulse irradiation. Appl Phys Lett 103:254101. https://doi.org/10.1063/1.4850528
Article ADS Google Scholar
Höhm S, Rosenfeld A, Krüger J, Bonse J (2013b) Femtosecond diffraction dynamics of laser-induced periodic surface structures on fused silica. Appl Phys Lett 102:054102. https://doi.org/10.1063/1.4790284
Article ADS Google Scholar
Höhm S, Herzlieb M, Rosenfeld A, Krüger J, Bonse J (2016) Dynamics of the formation of laser-induced periodic surface structures (LIPSS) upon femtosecond two-color double-pulse irradiation of metals, semiconductors, and dielectrics. Appl Surf Sci 374:331–338. https://doi.org/10.1016/j.apsusc.2015.12.129
Article ADS Google Scholar
Hörstmann-Jungemann M, Gottmann J, Wortmann D (2009) Nano- and microstructuring of SiO₂ and sapphire with fs-laser induced selective etching. J Laser Micro Nanoeng 4:135–140. https://doi.org/10.2961/jlmn.2009.02.0011
Article Google Scholar
Hou S, Huo Y, Xiong P, Zhang Y, Zhang S, Jia T, Sun Z, Qiu J, Xu Z (2011) Formation of long- and short-periodic nanoripples on stainless steel irradiated by femtosecond laser pulses. J Phys D 44:505401. https://doi.org/10.1088/0022-3727/44/50/505401
Article ADS Google Scholar
Hsu EM, Crawford THR, Tiedje HF, Haugen HK (2007) Periodic surface structures on gallium phosphide after irradiation with 150 fs – 7 ns laser pulses at 800 nm. Appl Phys Lett 91:111102. https://doi.org/10.1063/1.2779914
Article ADS Google Scholar
Huang M, Zhao F, Cheng Y, Xu N, Xu Z (2009a) Mechanisms of ultrafast laser-induced deep-subwavelength gratings on graphite and diamond. Phys Rev B 79:125436. https://doi.org/10.1103/PhysRevB.79.125436
Article ADS Google Scholar
Huang M, Zhao F, Cheng Y, Xu N, Xu Z (2009b) Origin of laser-induced near-subwavelength ripples: interference between surface plasmons and incident laser. ACS Nano 3:4062–4070. https://doi.org/10.1021/nn900654v
Article Google Scholar
Huang M, Zhao F, Cheng Y, Xu N, Xu Z (2010) The morphological and optical characteristics of femtosecond laser-induced large-area micro/nanostructures on GaAs, Si, and brass. Opt Express 18:A600–A619. https://doi.org/10.1364/OE.18.00A600
Article ADS Google Scholar
Huang M, Cheng Y, Zhao F, Xu Z (2013) The significant role of plasmonic effects in femtosecond laser-induced grating fabrication on the nanoscale. Ann Phys (Berlin) 525:74–86. https://doi.org/10.1002/andp.201200136
Article ADS Google Scholar
Jia TQ, Chen HX, Huang M, Zhao FL, Qiu JR, Li RX, Xu ZZ, He XK, Zhang J, Kuroda H (2005) Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses. Phys Rev B 72:125429. https://doi.org/10.1103/PhysRevB.72.125429
Article ADS Google Scholar
Jia X, Jia TQ, Peng NN, Feng DH, Zhang SA, Sun ZR (2014) Dynamics of femtosecond laser-induced periodic surface structures on silicon by high spatial and temporal resolution imaging. J Appl Phys 115:143102. https://doi.org/10.1063/1.4870445
Article ADS Google Scholar
Jiang L, Wang AD, Li B, Cui TH, Lu YF (2018) Electrons dynamics control by shaping femtosecond laser pulses in micro/nanofabrication: modeling, method, measurement and application. Light 7:17134. https://doi.org/10.1038/lsa.2017.134
Article Google Scholar
Katsumata Y, Morita T, Morimoto Y, Shintani T, Saiki T (2014) Self-organization of a periodic structure between amorphous and crystalline phases in a GeTe thin film induced by femtosecond laser pulse amorphization. Appl Phys Lett 105:031907. https://doi.org/10.1063/1.4890862
Article ADS Google Scholar
Kietzig AM, Hatzikiriakos SG, Englezos P (2009) Patterned superhydrophobic metallic surfaces. Langmuir 25:4821–4827. https://doi.org/10.1021/la8037582
Article Google Scholar
Kirner SV, Hermens U, Mimidis A, Skoulas E, Florian C, Hischen F, Plamadeala C, Baumgartner W, Winands K, Mescheder H, Krüger J, Solis J, Siegel J, Stratakis E, Bonse J (2017a) Mimicking bug-like surface structures and their fluid transport produced by ultrashort laser pulse irradiation of steel. Appl Phys A 123:754. https://doi.org/10.1007/s00339-017-1317-3
Article ADS Google Scholar
Kirner SV, Wirth T, Sturm H, Krüger J, Bonse J (2017b) Nanometer-resolved chemical analyses of femtosecond laser-induced periodic surface structures on titanium. J Appl Phys 122:104901. https://doi.org/10.1063/1.4993128
Article ADS Google Scholar
Kirner SV, Slachciak N, Elert AM, Griepentrog M, Fischer D, Hertwig A, Sahre M, Dörfel I, Sturm H, Pentzien S, Koter R, Spaltmann D, Krüger J, Bonse J (2018) Tribological performance of titanium samples oxidized by fs-laser radiation, thermal heating, or electrochemical anodization. Appl Phys A 124:326. https://doi.org/10.1007/s00339-018-1745-8
Article ADS Google Scholar
Klinger D, Sobierajski R, Nietubyc R, Krzywinski J, Pelka J, Juha L et al (2009) Surface modification of polymethylmethacrylate irradiated with 60 fs single laser pulses. Radiat Phys Chem 78:S71–S74. https://doi.org/10.1016/j.radphyschem.2009.04.031
Article Google Scholar
Knüttel T, Bergfeld S, Haas S (2013) Laser texturing of surfaces in thin-film silicon photovoltaics – a comparison of potential processes. J Laser Micro Nanoeng 8:222–229. https://doi.org/10.2961/jlmn.2013.03.0007
Article Google Scholar
Kunz C, Bartolomé JF, Gnecco E, Müller FA, Gräf S (2018a) Selective generation of laser-induced periodic surface structures on Al₂O₃-ZrO₂-Nb composites. Appl Surf Sci 434:582–587. https://doi.org/10.1016/j.apsusc.2017.10.224
Article ADS Google Scholar
Kunz C, Büttner TN, Naumann B, Boehm AV, Gnecco E, Bonse J, Neumann C, Turchanin A, Müller FA, Gräf S (2018b) Large-area fabrication of low- and high-spatial-frequency laser-induced periodic surface structures on carbon fibers. Carbon 133:176–185. https://doi.org/10.1016/j.carbon.2018.03.035
Article Google Scholar
Lange K, Schulz-Ruhtenberg M, Caro J (2017) Platinum electrodes for oxygen reduction catalysis designed by ultrashort pulse laser structuring. Chem Electro Chem 4:570–576. https://doi.org/10.1002/celc.201600630
Article Google Scholar
Le Harzic R, Schuck H, Sauer D, Anhut T, Riemann I, König K (2005) Sub-100 nm nanostructuring of silicon by ultrashort laser pulses. Opt Express 13:6651–6656. https://doi.org/10.1364/OPEX.13.006651
Article ADS Google Scholar
Levy Y, Derrien TJY, Bulgakova NM, Gurevich EL, Mocek T (2016) Relaxation dynamics of femtosecond-laser-induced temperature modulation on the surfaces of metals and semiconductors. Appl Surf Sci 374:157–164. https://doi.org/10.1016/j.apsusc.2015.10.159
Article ADS Google Scholar
Lippert T, Dickinson JT (2003) Chemical and spectroscopic aspects of polymer ablation: special features and novel directions. Chem Rev 103:453–2486. https://doi.org/10.1021/cr010460q
Article Google Scholar
Liu Z, Siegel J, Garcia-Lechuga M, Epicier T, Lefkir Y, Reynaud S, Bugnet M, Vocanson F, Solis J, Vitrant G, Destouches N (2017) Three-dimensional self-organization in nanocomposite layered systems by ultrafast laser pulses. ACS Nano 11:5031–5040. https://doi.org/10.1021/acsnano.7b01748
Article Google Scholar
Lou K, Qian SX, Wang XL, Li Y, Gu B, Tu C, Wang HT (2012) Two-dimensional microstructures induced by femtosecond vector light fields on silicon. Opt Express 20:120–127. https://doi.org/10.1364/OE.20.000120
Article ADS Google Scholar
Lübcke A, Andreev AA, Höhm S, Grunwald R, Ehrentraut L, Schnürer M (2017) Prospects of target nanostructuring for laser proton acceleration. Sci Rep 7:44030. https://doi.org/10.1038/srep44030
Article ADS Google Scholar
Luo CW, Tang WT, Wang HI, Liao LW, Lo HP, Wu KH, Lin JY, Juang JY, Uen TM, Kobayashi T (2012) Controllable subwavelength-ripple and -dot structures on YBa₂Cu₃O₇ induced by ultrashort laser pulses. Supercond Sci Technol 25:115008. https://doi.org/10.1088/0953-2048/25/11/115008
Article ADS Google Scholar
Lutey AHA, Gemini L, Romoli L, Lazzini G, Fuso F, Faucon M, Kling R (2018) Towards laser-textured antibacterial surfaces. Sci Rep 8:10112. https://doi.org/10.1038/s41598-018-28454-2
Article ADS Google Scholar
Madéo J, Margiolakis A, Zhao ZY, Hale PJ, Man MKL, Zhao QZ, Peng W, Shi WZ, Dani KM (2015) Ultrafast properties of femtosecond-laser-ablated GaAs and its application to terahertz optoelectronics. Opt Lett 40:3388–3391. https://doi.org/10.1364/OL.40.003388
Article ADS Google Scholar
Messaddeq SH, Vallée R, Soucy P, Bernier M, El-Amraoui M, Messaddeq Y (2012) Self-organized periodic structures on Ge-S based chalcogenide glass induced by femtosecond laser irradiation. Opt Express 20:29882–29889. https://doi.org/10.1364/OE.20.029882
Article ADS Google Scholar
Mezera M, van Drongelen M, Römer GRBE (2018) Laser-induced periodic surface structures (LIPSS) on polymers processed with picosecond laser pulses. J Laser Micro Nanoeng 13:105–116. https://doi.org/10.2961/jlmn.2018.02.0010
Article Google Scholar
Miyaji G, Miyazaki K, Zhang K, Yoshifuji T, Fujita J (2012) Mechanism of femtosecond-laser-induced periodic nanostructure formation on crystalline silicon surface immersed in water. Opt Express 20:14848–14856. https://doi.org/10.1364/OE.20.014848
Article ADS Google Scholar
Müller FA, Kunz C, Gräf S (2016) Bio-inspired functional surfaces based on laser-induced periodic surface structures. Materials (Basel, Switzerland) 9:476. https://doi.org/10.3390/ma9060476
Article ADS Google Scholar
Murphy RD, Torralva B, Adams DP, Yalisove SM (2013) Pump-probe imaging of laser-induced periodic surface structures after ultrafast irradiation of Si. Appl Phys Lett 103:141104. https://doi.org/10.1063/1.4823588
Article ADS Google Scholar
Murphy RD, Torralva B, Adams DP, Yalisove SM (2014) Polarization dependent formation of femtosecond laser-induced periodic surface structures near stepped features. Appl Phys Lett 104:231117. https://doi.org/10.1063/1.4882998
Article ADS Google Scholar
Nemanich RJ, Biegelsen DK, Hawkins WG (1983) Aligned, coexisting liquid and solid regions in laser-annealed Si. Phys Rev B 27:7817–7819. https://doi.org/10.1103/PhysRevB.27.7817
Article ADS Google Scholar
Niino H, Yabe A (1992) Excimer laser ablation of polyethersulfone derivatives: periodic morphological micro-modification on ablated surface. J Photochem Photobiol A 65:303–312. https://doi.org/10.1016/1010-6030(92)85055-Y
Article Google Scholar
Nivas JJJ, He S, Rubano A, Vecchione A, Paparo D, Marrucci L, Bruzzese R, Amoruso S (2015) Direct femtosecond laser surface structuring with optical vortex beams generated by a q-plate. Sci Rep 5:17929. https://doi.org/10.1038/srep17929
Article ADS Google Scholar
Nürnberger P, Reinhardt H, Kim HC, Yang F, Peppler K, Janek J, Hampp N (2015) Influence of substrate microcrystallinity on the orientation of laser-induced periodic surface structures. J Appl Phys 118:134306. https://doi.org/10.1063/1.4932215
Article ADS Google Scholar
Nürnberger P, Reinhardt HM, Kim HC, Pfeifer E, Kroll M, Müller S, Yang F, Hampp NA (2017) Orthogonally superimposed laser-induced periodic surface structures (LIPSS) upon nanosecond laser pulse irradiation of SiO₂/Si layered systems. Appl Surf Sci 425:682–688. https://doi.org/10.1016/j.apsusc.2017.06.316
Article ADS Google Scholar
Okamuro K, Hashida M, Miyasaka Y, Ikuta Y, Tokita S, Sakabe S (2010) Laser fluence dependence of periodic grating structures formed on metal surfaces under femtosecond laser pulse irradiation. Phys Rev B 82:165417. https://doi.org/10.1103/PhysRevB.82.165417
Article ADS Google Scholar
Öktem B, Pavlov I, Ilday S, Kalaycıoglu H, Rybak A, Yavas S, Erdogan M, Ilday FÖ (2013) Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses. Nature Photon 7:897–901. https://doi.org/10.1038/NPHOTON.2013.272
Article ADS Google Scholar
Oliveira V, Sharma SP, de Moura MFSF, Moreira RDF, Vilar R (2017) Surface treatment of CFRP composites using femtosecond laser radiation. Opt Lasers Eng 94:37–43. https://doi.org/10.1016/j.optlaseng.2017.02.011
Article Google Scholar
Pan A, Dias A, Gomez-Aranzadi M, Olaizola SM, Rodriguez A (2014) Formation of laser-induced periodic surface structures on niobium by femtosecond laser irradiation. J Appl Phys 115:173101. https://doi.org/10.1063/1.4873459
Article ADS Google Scholar
Pan Y, Yang M, Li Y, Wang Z, Zhang C, Zhao Y, Yao J, Wu Q, Xu J (2017) Threshold dependence of deep and near-subwavelength ripples formation on natural MoS₂ induced by femtosecond laser. Sci Rep 6:19571. https://doi.org/10.1038/srep19571
Article ADS Google Scholar
Petrovic SM, Gakovic B, Perusko D, Stratakis E, Bogdanovic-Radovic I, Cekada M, Fotakis C, Jelenkovic B (2013) Femtosecond laser-induced periodic surface structure on the Ti-based nanolayered thin films. J Appl Phys 114:233108. https://doi.org/10.1063/1.4848016
Article ADS Google Scholar
Pfeiffer M, Engel A, Gruettner H, Guenther K, Marquardt F, Reisse G, Weissmantel S (2013) Ripple formation in various metals and super-hard tetrahedral amorphous carbon films in consequence of femtosecond laser irradiation. Appl Phys A 110:655–659. https://doi.org/10.1007/s00339-012-7146-5
Article ADS Google Scholar
Raether H (1988) Surface plasmons on smooth and rough surfaces and on gratings. Springer, Berlin
Book Google Scholar
Rasedujjaman M, Gallais L (2018) Polarization dependent laser damage growth of optical coatings at the sub-picosecond regime. Opt Express 26:24444–24460. https://doi.org/10.1364/OE.26.024444
Article ADS Google Scholar
Rebollar E, Frischauf I, Olbrich M, Peterbauer T, Hering S, Preiner J, Hinterdorfer P, Romanin C, Heitz J (2008) Proliferation of aligned mammalian cells on laser-nanostructured polystyrene. Biomaterials 29:1796–1806. https://doi.org/10.1016/j.biomaterials.2007.12.039
Article Google Scholar
Rebollar E, Vázquez de Aldana RJ, Pérez-Hernández JA, Ezquerra TA, Moreno P, Castillejo M (2012) Ultraviolet and infrared femtosecond laser induced periodic surface structures on thin polymer films. Appl Phys Lett 100:041106. https://doi.org/10.1063/1.3679103
Article ADS Google Scholar
Rebollar E, Vázquez de Aldana RJ, Martín-Fabiani I, Hernández M, Rueda DR, Ezquerra TA, Domingo C, Moreno P, Castillejo M (2013) Assessment of femtosecond laser induced periodic surface structures on polymer films. Phys Chem Chem Phys 15:11287. https://doi.org/10.1039/c3cp51523k
Article Google Scholar
Rebollar E, Castillejo M, Ezquerra TA (2015) Laser induced periodic surface structures on polymer films: from fundamentals to applications. Eur Polym J 73:162–174. https://doi.org/10.1016/j.eurpolymj.2015.10.012
Article Google Scholar
Reif J, Costache F, Henyk M, Pandelov SV (2002) Ripples revisited: non-classical morphology at the bottom of femtosecond laser ablation craters in transparent dielectrics. Appl Surf Sci 197–198:891–895. https://doi.org/10.1016/S0169-4332(02)00450-6
Article ADS Google Scholar
Reif J, Varlamova O, Uhlig S, Varlamov S, Bestehorn M (2014) On the physics of self-organized nanostructure formation upon femtosecond laser ablation. Appl Phys A 117:179–184. https://doi.org/10.1007/s00339-014-8339-x
Article ADS Google Scholar
Rohloff M, Das SK, Höhm S, Grunwald R, Rosenfeld A, Krüger J, Bonse J (2011) Formation of laser-induced periodic surface structures on fused silica upon multiple cross-polarized double-femtosecond-laser-pulse irradiation sequences. J Appl Phys 110:014910. https://doi.org/10.1063/1.3605513
Article ADS Google Scholar
Romoli L, Rashed CAA, Lovicu G, Dini G, Tantussi F, Fuso F, Fiaschi M (2014) Ultrashort pulsed laser drilling and surface structuring of microholes in stainless steels. CIRP Ann Manuf Technol 63:229–232. https://doi.org/10.1016/j.cirp.2014.03.053
Article Google Scholar
Rosenfeld A, Höhm S, Krüger J, Bonse J (2018) Dynamics of ultrashort double-pulse laser ablation of solid surfaces. In: Wandelt K (ed) Encyclopedia of interfacial chemistry: surfaces and electrochemistry, vol 2. Elsevier, Amsterdam, pp 338–347. https://doi.org/10.1016/B978-0-12-409547-2.14127-7
Chapter Google Scholar
Rudenko A, Colombier JP, Höhm S, Rosenfeld A, Krüger J, Bonse J, Itina TE (2017) Spontaneous periodic ordering on the surface and in the bulk of dielectrics irradiated by ultrafast laser: a shared electromagnetic origin. Sci Rep 7:12306. https://doi.org/10.1038/s41598-017-12502-4
Article ADS Google Scholar
Rudenko A, Mauclair C, Garrelie F, Stoian R, Colombier JP (2019) Self-organization of surfaces on the nanoscale by topography-mediated selection of quasi-cylindrical and plasmonic waves. Nanophotonics 8:459–465. https://doi.org/10.1515/nanoph-2018-0206
Article Google Scholar
Rudolph P, Kautek W (2004) Composition influence of non-oxidic ceramics on self-assembled nanostructures due to fs-laser irradiation. Thin Solid Films 453–454:537–541. https://doi.org/10.1016/j.tsf.2003.11.109
Article Google Scholar
Ruiz de la Cruz A, Lahoz R, Siegel J, de la Fuente GF, Solis J (2014) High speed inscription of uniform, large-area laser-induced periodic surface structures in Cr films using a high repetition rate fs laser. Opt Lett 39:2491–2494. https://doi.org/10.1364/OL.39.002491
Article ADS Google Scholar
Sakabe S, Hashida M, Tokita S, Namba S, Okamuro K (2009) Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse. Phys Rev B 79:033409. https://doi.org/10.1103/PhysRevB.79.033409
Article ADS Google Scholar
Schille J, Schneider L, Müller M, Löschner U, Goddard N, Scully P, Exner H (2014) Highspeed laser micro processing using ultrashort laser pulses. J Laser Micro Nanoeng 9:161–169. https://doi.org/10.2961/jlmn.2014.02.0015
Article Google Scholar
Schneider L, Schille J, Mauersberger S, Kujawa K, Löschner U (2017) Großflächige und schnelle Funktionalisierung von technischen Oberflächen mittels Ultrakurzpuls-Laserbearbeitung. Sci Rep 02:37–42
Google Scholar
Sedao X, Maurice C, Garrelie F, Colombier JP, Reynaud S, Quey R, Pigeon F (2014) Influence of crystal orientation on the formation of femtosecond laser-induced periodic surface structures and lattice defects accumulation. Appl Phys Lett 104:171605. https://doi.org/10.1063/1.4874626
Article ADS Google Scholar
Sedao X, Shugaev MV, Wu C, Douillard T, Esnouf C, Maurice C, Reynaud S, Pigeon F, Garrelie F, Zhigilei LV, Colombier JP (2016) Growth twinning and generation of high-frequency surface nanostructures in ultrafast laser-induced transient melting and resolidification. ACS Nano 10:6995–7007. https://doi.org/10.1021/acsnano.6b02970
Article Google Scholar
Seifert G, Kaempfe M, Syrowatka F, Harnagea C, Hesse D, Graener H (2005) Self-organized structure formation on the bottom of femtosecond laser ablation craters in glass. Appl Phys A 81:799–803. https://doi.org/10.1007/s00339-004-2867-8
Article ADS Google Scholar
Shimizu H, Obara G, Terakawa M, Mazur E, Obara M (2013) Evolution of femtosecond laser-induced surface ripples on lithium niobate crystal surfaces. Appl Phys Express 6:112701. https://doi.org/10.7567/APEX.6.112701
Article ADS Google Scholar
Shimotsuma Y, Kazansky P, Qiu J, Hirao K (2003) Self-organized nanogratings in glass irradiated by ultrashort light pulses. Phys Rev Lett 91:247405. https://doi.org/10.1103/PhysRevLett.91.247405
Article ADS Google Scholar
Shugaev MV, Gnilitskyi I, Bulgakova NM, Zhigilei LV (2017) Mechanism of single-pulse ablative generation of laser-induced periodic surface structures. Phys Rev B 96:205429. https://doi.org/10.1103/PhysRevB.96.205429
Article ADS Google Scholar
Siegman AE, Fauchet PM (1986) Stimulated Wood’s anomalies on laser-illuminated surfaces. IEEE J Quantum Electron 22:1384–1403. https://doi.org/10.1109/JQE.1986.1073133
Article ADS Google Scholar
Sipe JE, Young JF, Preston JS, van Driel HM (1983) Laser-induced periodic surface structure. I. Theory. Phys Rev B 27:1141–1154. https://doi.org/10.1103/PhysRevB.27.1141
Article ADS Google Scholar
Skolski JZP, Römer GRBE, Obona JV, Ocelik V, Huis in’t Veld AJ, De Hosson JTM (2012) Laser-induced periodic surface structures: fingerprints of light localization. Phys Rev B 85:075320. https://doi.org/10.1103/PhysRevB.85.075320
Article ADS Google Scholar
Soileau MJ (1984) Ripple structures associated with ordered surface defects in dielectrics. IEEE J Quantum Electron 20:464–467. https://doi.org/10.1109/JQE.1984.1072422
Article ADS Google Scholar
Sokolowski-Tinten K, Barty A, Boutet S, Shymanovich U, Chapman H et al (2010) Short-pulse laser induced transient structure formation and ablation studied with time-resolved coherent XUV scattering. AIP Conf Proc 1278:373–379. https://doi.org/10.1063/1.3507123
Article ADS Google Scholar
Steeg B, Juha L, Feldhaus J, Jacobi S, Sobierajski R, Michaelsen C, Andrejczuk A, Krzywinski J (2004) Total reflection amorphous carbon mirrors for vacuum ultraviolet free electron lasers. Appl Phys Lett 84:657–659. https://doi.org/10.1063/1.1645320
Article ADS Google Scholar
Sugioka K, Cheng Y (2014) Femtosecond laser three-dimensional micro- and nanofabrication. Appl Phys Rev 1:041303. https://doi.org/10.1063/1.4904320
Article Google Scholar
Temple PA, Soileau MJ (1981) Polarization charge model for laser-induced ripple patterns in dielectric materials. IEEE J Quantum Electron 17:2067–2072. https://doi.org/10.1109/JQE.1981.1070638
Article ADS Google Scholar
Ten JS, Sparkes M, O’Neill W (2018) Femtosecond laser-induced chemical vapor deposition of tungsten quasi-periodic structures on silicon substrates. J Laser Appl 30:032606. https://doi.org/10.2351/1.5040637
Article Google Scholar
Terakawa M (2018) Femtosecond laser processing of biodegradable polymers. Appl Sci 8:1123. https://doi.org/10.3390/app8071123
Article Google Scholar
Tomita T, Kumai R, Matsuo S, Hashimoto S, Yamaguchi M (2009) Cross-sectional morphological profiles of ripples on Si, SiC, and HOPG. Appl Phys A 97:271–276. https://doi.org/10.1007/s00339-009-5364-2
Article ADS Google Scholar
Tsibidis GD, Fotakis C, Stratakis E (2015) From ripples to spikes: a hydrodynamical mechanism to interpret femtosecond laser-induced self-assembled structures. Phys Rev B 92:41405(R). https://doi.org/10.1103/PhysRevB.92.041405
Article Google Scholar
Tsibidis GD, Mimidis A, Skoulas E, Kirner SV, Krüger J, Bonse J, Stratakis E (2018) Modelling periodic structure formation on 100Cr6 steel after irradiation with femtosecond-pulsed laser beams. Appl Phys A 124:27. https://doi.org/10.1007/s00339-017-1443-y
Article ADS Google Scholar
Van Driel HM, Sipe JE, Young JF (1982) Laser-induced periodic surface-structure on solids – a universal phenomenon. Phys Rev Lett 49:1955–1958. https://doi.org/10.1103/PhysRevLett.49.1955
Article ADS Google Scholar
Volkov RV, Golishnikov DM, Gordienko VM, Savel’ev AB (2003) Overheated plasma at the surface of a target with a periodic structure induced by femtosecond laser radiation. J Exp Theor Phys Lett 77:473–476. https://doi.org/10.1134/1.1591972
Article Google Scholar
Vorobyev AY, Guo C (2008) Spectral and polarization responses of femtosecond laser-induced periodic surface structures on metals. J Appl Phys 103:043513. https://doi.org/10.1063/1.2842403
Article ADS Google Scholar
Vorobyev AY, Guo C (2013) Direct femtosecond laser surface nano/microstructuring and its applications. Laser Photon Rev 7:385–407. https://doi.org/10.1002/lpor.201200017
Article ADS Google Scholar
Vorobyev AY, Makin VS, Guo C (2007) Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals. J Appl Phys 101:034903. https://doi.org/10.1063/1.2432288
Article ADS Google Scholar
Vorobyev AY, Makin VS, Guo C (2009) Brighter light sources from black metal: significant increase in emission efficiency of incandescent light sources. Phys Rev Lett 102:234301. https://doi.org/10.1103/PhysRevLett.102.234301
Article ADS Google Scholar
Voyer J, Ausserer F, Klien S, Ristow A, Velkavrh I, Diem A, Zehetner J, Stroj S, Heidegger S, Bertschler C, Edlinger J (2017) Sub-micro laser modifications of tribological surfaces. Mater Perform Charact 6:42–67. https://doi.org/10.1520/MPC20160015
Article Google Scholar
Wagner R, Gottmann J (2007) Sub-wavelength ripple formation on various materials induced by tightly focused femtosecond laser radiation. J Phys Conf Ser 59:333–337. https://doi.org/10.1088/1742-6596/59/1/070
Article ADS Google Scholar
Wallat K, Dörr D, Le Harzic R, Stracke F, Sauer D, Neumeier M, Kovtun A, Zimmermann H, Epple M (2012) Cellular reactions toward nanostructured silicon surfaces created by laser ablation. J Laser Appl 24:042016. https://doi.org/10.2351/1.4732594
Article Google Scholar
Wang C, Huo H, Johnson M, Shen M, Mazur E (2010) The thresholds of surface nano−/micro-morphology modifications with femtosecond laser pulse irradiations. Nanotechnology 21:075304. https://doi.org/10.1088/0957-4484/21/7/075304
Article ADS Google Scholar
Wang Z, Zhao Q, Wang C (2015) Reduction of friction of metals using laser-induced periodic surface nanostructures. Micromachines 6:1606–1616. https://doi.org/10.3390/mi6111444
Article Google Scholar
Wang L, Chen QD, Cao XW, Buividas R, Wang X, Juodkazis S, Sun HB (2017) Plasmonic nano-printing: large-area nanoscale energy deposition for efficient surface texturing. Light 6:e17112. https://doi.org/10.1038/lsa.2017.112
Article Google Scholar
Wu Q, Ma Y, Fang R, Liao Y, Yu Q, Chen X, Wang K (2003) Femtosecond laser-induced periodic surface structure on diamond film. Appl Phys Lett 82:1703–1705. https://doi.org/10.1063/1.1561581
Article ADS Google Scholar
Xue H, Deng G, Feng G, Chen L, Li J, Yang C, Zhou S (2017) Role of nanoparticles generation in the formation of femtosecond laser-induced periodic surface structures on silicon. Opt Lett 42:3315–3318. https://doi.org/10.1364/OL.42.003315
Article ADS Google Scholar
Young JF, Preston JS, van Driel HM, Sipe JE (1983) Laser-induced periodic surface structure. II. Experiments on Ge, Si, Al, and brass. Phys Rev B 27:1155–1172. https://doi.org/10.1103/PhysRevB.27.1155
Article ADS Google Scholar
Young JF, Sipe JE, van Driel HM (1984) Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium. Phys Rev B 30:2001–2015. https://doi.org/10.1103/PhysRevB.30.2001
Article ADS Google Scholar
Zhang Q, Lin H, Jia B, Xu L, Gu M (2010) Nanogratings and nanoholes fabricated by direct femtosecond laser writing in chalcogenide glasses. Opt Express 18:6885–6890. https://doi.org/10.1364/OE.18.006885
Article ADS Google Scholar
Zhang CY, Yao JW, Liu HY, Dai QF, Wu LJ, Lan S, Trofimov VA, Lysak TM (2012) Colorizing silicon surface with regular nanohole arrays induced by femtosecond laser pulses. Opt Lett 37:1106–1108. https://doi.org/10.1364/OL.37.001106
Article ADS Google Scholar
Zhang H, Colombier JP, Li C, Faure N, Cheng G, Stoian R (2015) Coherence in ultrafast laser-induced periodic surface structures. Phys Rev B 92:174109. https://doi.org/10.1103/PhysRevB.92.174109
Article ADS Google Scholar
Zorba V, Stratakis E, Barberoglou M, Spanakis E, Tzanetakis P, Fotakis C (2008) Tailoring the wetting response of silicon surfaces via fs laser structuring. Appl Phys A 93:819–825. https://doi.org/10.1007/s00339-008-4757-y
Article ADS Google Scholar

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Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, Germany
Jörn Bonse, Sabrina V. Kirner & Jörg Krüger

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Jörg Krüger
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RIKEN-SIOM Joint Research Unit, RIKEN Center for Advanced Photonics RIKEN-SIOM Joint Research Unit, Wako, Saitama, Japan
Koji Sugioka

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School of Materials Science and Engineering, Tsinghua University, Beijing, P.R. China
Minlin Zhong

Glossary

A: Absorbed energy at the surface
α: Linear absorption coefficient
b: Fourier spectrum of surface roughness
D: Gaussian beam diameter
d: Depth
δ _SPP: SPP penetration depth
δθ: Opening angle
Δt: Delay time
E: Laser pulse energy
\( \overrightarrow{E} \): Electric field vector/laser polarization
E _g: Band gap energy
ε, ε∗: Dielectric permittivity (∗: Excited material)
f: Pulse repetition frequency
F: Filling factor
ϕ, ϕ₀, ϕ_th: Fluence, peak fluence, threshold fluence
h: Film thickness
κ: Normalized wave vector component
L _SPP: SPP propagation length
λ: Wavelength
Λ: Period
N: Number of pulses per irradiated spot
N _e: Electron density
N _{eff_1D}: Effective number of pulses per beam spot diameter
n, n₀, n_M: Refractive index (real part)
η: Efficacy factor
r: Radial coordinate
R: Reflectivity
s: Shape factor
T: Temperature
t: Time
τ: Pulse duration
θ: Angle of incidence
v: Scan velocity
w ₀: Gaussian beam radius
BT: Benzenethiol
CB: Conduction band
CFRP: Carbon fiber-reinforced plastics
COF: Coefficient of friction
CW: Cylindrical wave
DESY: German Electron synchrotron
FDTD: Finite-difference time-domain
FT: Fourier transform
HSFL: High-spatial-frequency LIPSS
IR: Infrared
LIPSS: Laser-induced periodic surface structures
LSFL: Low-spatial-frequency LIPSS
MD: Molecular dynamics
NIR: Near-infrared
NP: Nanoparticle
PC: Polycarbonate
PET: Poly(ethylene terephthalate)
PI: Polyimide
PLLA: Poly-L-lactic acid
PMMA: Poly(methyl methacrylate)
PS: Polystyrene
PTT: Poly(trimethylene terephthalate)
RR: Radiation remnant
RSTT: Reciprocating sliding tribological test
RT: Room temperature
SEM: Scanning electron microscopy
SERS: Surface-enhanced Raman scattering
SEW: Surface electromagnetic wave
SiC: Silicon carbide
SPP: Surface plasmon polariton
UV: Ultraviolet
VB: Valence band
XUV: Extreme ultraviolet

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Bonse, J., Kirner, S.V., Krüger, J. (2021). Laser-Induced Periodic Surface Structures (LIPSS). In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-319-69537-2_17-2

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DOI: https://doi.org/10.1007/978-3-319-69537-2_17-2
Received: 11 September 2019
Accepted: 04 November 2019
Published: 21 October 2020
Publisher Name: Springer, Cham
Print ISBN: 978-3-319-69537-2
Online ISBN: 978-3-319-69537-2
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Laser-Induced Periodic Surface Structures (LIPSS)

Published:

21 October 2020

DOI: https://doi.org/10.1007/978-3-319-69537-2_17-2
Original
Laser-Induced Periodic Surface Structures (LIPSS)

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07 January 2020

DOI: https://doi.org/10.1007/978-3-319-69537-2_17-1