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Helium Ion Microscopy

  • Book
  • © 2016

Overview

Editors:
  1. Gregor Hlawacek

    1. Inst. for Ion Beam Physics and Materials Research, Hemholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

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  2. Armin Gölzhäuser

    1. Physics of Supramolecular Systems and Surfaces, Bielefeld University, Bielefeld, Germany

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    You can also search for this editor in PubMed   Google Scholar

  • Written by the leading professionals in the field
  • Highlights the basic physics as well as the technological aspects of the instrument
  • Presents the relevant theoretical models and the corresponding software packages
  • Describes real applications of the technique
  • Includes supplementary material: sn.pub/extras

Part of the book series: NanoScience and Technology (NANO)

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Table of contents (19 chapters)

  1. Front Matter

    Pages i-xxiii
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  2. Fundamentals

    1. Front Matter

      Pages 1-1
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    2. The Helium Ion Microscope

      • John Notte, Jason Huang
      Pages 3-30

    3. Single Atom Gas Field Ion Sources for Scanning Ion Microscopy

      • Radovan Urban, Robert A. Wolkow, Jason L. Pitters
      Pages 31-61

    4. Structural Changes in 2D Materials Due to Scattering of Light Ions

      • Ossi Lehtinen, Jani Kotakoski
      Pages 63-88

    5. Monte Carlo Simulations of Focused Ion Beam Induced Processing

      • Rajendra Timilsina, Philip D. Rack
      Pages 89-118

    6. Secondary Electron Generation in the Helium Ion Microscope: Basics and Imaging

      • Yuri V. Petrov, Oleg F. Vyvenko
      Pages 119-146

  3. Microscopy

    1. Front Matter

      Pages 147-147
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    2. Introduction to Imaging Techniques in the HIM

      • Stuart A. Boden
      Pages 149-172

    3. HIM of Biological Samples

      • Armin Gölzhäuser, Gregor Hlawacek
      Pages 173-185

    4. HIM Applications in Combustion Science: Imaging of Catalyst Surfaces and Nascent Soot

      • Henning Vieker, André Beyer
      Pages 187-203

    5. Channeling and Backscatter Imaging

      • Gregor Hlawacek, Vasilisa Veligura, Raoul van Gastel, Bene Poelsema
      Pages 205-224

    6. Helium Ion Microscopy of Carbon Nanomembranes

      • Armin Gölzhäuser
      Pages 225-244

    7. Helium Ion Microscopy for Two-Dimensional Materials

      • Yangbo Zhou, Daniel S. Fox, Hongzhou Zhang
      Pages 245-262

  4. Analysis

    1. Front Matter

      Pages 263-263
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    2. Backscattering Spectrometry in the Helium Ion Microscope: Imaging Elemental Compositions on the nm Scale

      • Rene Heller, Nico Klingner, Gregor Hlawacek
      Pages 265-295

    3. SIMS on the Helium Ion Microscope: A Powerful Tool for High-Resolution High-Sensitivity Nano-Analytics

      • Tom Wirtz, David Dowsett, Patrick Philipp
      Pages 297-323

    4. Ionoluminescence

      • Vasilisa Veligura, Gregor Hlawacek
      Pages 325-351

  5. Modification

    1. Front Matter

      Pages 353-353
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    2. Direct–Write Milling and Deposition with Noble Gases

      • Ivan Shorubalko, Lex Pillatsch, Ivo Utke
      Pages 355-393
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Keywords

About this book

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

Editors and Affiliations

  • Inst. for Ion Beam Physics and Materials Research, Hemholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

    Gregor Hlawacek

  • Physics of Supramolecular Systems and Surfaces, Bielefeld University, Bielefeld, Germany

    Armin Gölzhäuser

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