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Electro-Thermal-Mechanical Modeling of Gas Sensor Hotplates

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Sensor Systems Simulations

Abstract

Before fabrication, sensors are often designed, simulated, and optimized using the Technology Computer Aided Design (TCAD) tools to reduce the manufacturing costs and the prototype development cycle. In this chapter, the electro-thermo-mechanical behavior of gas sensor hotplates is simulated by means of the finite element method (FEM). In particular, FEM is primarily used to study the mechanical stability of the membrane, the temperature uniformity over the active area, and the power consumption of the sensor. Furthermore, the chapter deals with the appropriate choice of the initial and boundary conditions of the problem, which are necessary to obtain accurate numerical solutions.

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Acknowledgements

Financial support by the Austrian Federal Government (in particular from Bundesministerium fĂ¼r Verkehr, Innovation und Technologie and Bundesministerium fĂ¼r Wissenschaft, Forschung und Wirtschaft) represented by Ă–sterreichische Forschungsförderungsgesellschaft mbH and the Styrian and the Tyrolean Provincial Government, represented by Steirische Wirtschaftsförderungsgesellschaft mbH and Standortagentur Tirol, within the framework of the COMET Funding Programme is gratefully acknowledged.

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Authors and Affiliations

  1. ams AG, Premstaetten, Austria

    Raffaele Coppeta, Gregor Toschkoff, Anderson Singulani, Zeeshan Ali, Martin Sagmeister & Sara Carniello

  2. Institute for Microelectronics, TU Wien, Vienna, Austria

    Ayoub Lahlalia, Siegfried Selberherr & Lado Filipovic

  3. Materials Center Leoben Forschung GmbH, Leoben, Austria

    Darjan Kozic, René Hammer & Johann Riedler

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  1. Raffaele Coppeta
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Correspondence to Raffaele Coppeta .

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Editors and Affiliations

  1. Delft University of Technology, Delft, The Netherlands

    Willem Dirk van Driel

  2. Infineon Technologies Dresden GmbH & Co. KG, Dresden, Germany

    Oliver Pyper

  3. Infineon Technologies Dresden GmbH & Co. KG, Dresden, Germany

    Cornelia Schumann

Appendix: Thermo-Mechanical Properties of W, SiO2, and Si3N4

Appendix: Thermo-Mechanical Properties of W, SiO2, and Si3N4

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Coppeta, R. et al. (2020). Electro-Thermal-Mechanical Modeling of Gas Sensor Hotplates. In: van Driel, W., Pyper, O., Schumann, C. (eds) Sensor Systems Simulations. Springer, Cham. https://doi.org/10.1007/978-3-030-16577-2_2

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  • DOI: https://doi.org/10.1007/978-3-030-16577-2_2

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