Abstract
An electrostatic micromirror is integrated with the piezoresistive sensor. The sensor detects the shear stress inside the torsion bar generated by the mirror rotation under the electrostatic driving. The sensor signal is confirmed to follow the static movement of the mirror. The short-term noise is improved from our previous level of about 0.1 degrees to 0.01 degrees. The main improvement is the modulation frequency (50 kHz) of the bias current setting higher than the mechanical resonant frequency of the micromirror (~10 kHz). With the electrical design for obtaining the lower impedance, the electrical band width of the sensor becomes larger than that of the mechanical one enabling the larger modulation frequency. The leak current is reduced with the passivation film. The characteristics of the sensor signal including accuracy, drift, sensitivity, become clearer.
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Aonuma, T., Kumagai, S., Sasaki, M., Tabata, M., Hane, K. (2010). Piezoresistive Rotation Angle Sensor in Micromirror for Feedback Control. In: Shirase, K., Aoyagi, S. (eds) Service Robotics and Mechatronics. Springer, London. https://doi.org/10.1007/978-1-84882-694-6_52
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DOI: https://doi.org/10.1007/978-1-84882-694-6_52
Publisher Name: Springer, London
Print ISBN: 978-1-84882-693-9
Online ISBN: 978-1-84882-694-6
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