Abstract
This chapter describes our results on distributed feedback quantum cascade lasers in the wavelength range around 5 μm and around 10 μm. We present two different gain region designs; one with three quantum wells and one with a double phonon resonance. Several fabrication techniques are also presented and analysed in terms of fabrication simplicity, performance, yield, and reliability. We will outline typical results for all devices and also show some interesting applications. In light of this, the chapter is organized as follows: We start with a brief introduction; in Sect. 2, the advantages and drawbacks of the different gain regions are outlined; Sect. 3 deals with the fabrication technology which was required to build these lasers; in Sect. 4, we present the measurement results on the devices; and finally, Sect. 5 describes two examples of interesting applications in the fields of optical spectroscopy and optical data transmission. The chapter ends with a brief conclusion and an outlook.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
J. Faist, F. Capasso, D.L. Sivco, C. Sirtori, A. L. Hutchinson, A.Y. Cho: Quantum cascade laser, Science 264, 553–556 (1994)
J. Faist, F. Capasso, C. Sirtori, D.L. Sivco, J.N. Baillargeon, A.L. Hutchinson, S. Chu, A.Y. Cho: High power mid-infrared (λ ∼ 5 μm) quantum cascade lasers operating above room temperature, Appl. Phys. Lett.68, 3680–3682 (1996)
C. Sirtori, J. Faist, F. Capasso, D.L. Sivco, A.L. Hutchinson, S. Chu, A.Y. Cho: Continuous wave operation of mid-infrared (7.4-8.6 μm) quantum cascade lasers up to 110 K temperature, Appl. Phys. Lett. 68, 1745–1747 (1996)
R. F. Kazarinov, R. A. Suris: Possibility of the amplification of electromagnetic waves in a semiconductor with a superlattice, Sov. Phys. Semicond. 5, 707–709 (1971)
T. Ando, A.B. Fowler, F. Stern: Electronic properties of two-dimensional systems, Rev. Mod. Phys. 54, 437–446 (1982)
L. C. West, S. J. Eglash: First observation of an extremely large-dipole infrared transition within the conduction band of a GaAs quantum well, Appl. Phys. Lett. 46, 1156–1158 (1985)
R. Ferreira, G. Bastard: Evaluation of some scattering times for electrons in unbiased and biased single-and multiple-quantum-well structures, Phys. Rev. B 40, 1074–1086 (1989)
F. Capasso, K. Mohammed, A.Y. Cho: Resonant tunneling through double barriers, perpendicular quantum transport phenomena in superlattices, and their device applications, IEEE J. Quantum Electron. 22, 1853–1869 (1986)
A. Cho: Molecular Beam Epitaxy (AIP, Woodbury, NW 1994)
H. Morkoc, C. Hopkins, C. A. Evans, Jr., A.Y. Cho: Chromium and tellurium redistribution in GaAs and Al0.3Ga0.7As grown by molecular beam epitaxy, J. Appl. Phys. 51, 5986–5991 (1980)
M.Y. Yen, B.F. Levine, C.G. Bethea, K.K. Choi, A.Y. Cho: Molecular beam epitaxial growth and optical properties of InAs1 x Sb x in 8-12 μm wavelength range, Appl. Phys. Lett. 50, 927–929 (1987)
R.R. Saxena, J.E. Fouquet, V.M. Sardi, R.L. Moon: High quality InP layers grown by organometallic vapor phase epitaxy using tertiarybutylphosphine and phosphine, Appl. Phys. Lett. 53, 304–306 (1988)
T.Y. Wang, K.L. Fry, A. Persson, E.H. Reihlen, G.B. Stringfellow: Atomic steps in thin GaInAs/lnP quantum-well structures grown by organometallic vapor phase epitaxy, J. Appl. Phys. 63, 2674–2680 (1988)
J. Faist, F. Capasso, C. Sirtori, D.L. Sivco, A.L. Hutchinson, A.Y. Cho: Continuous wave operation of a vertical transition quantum cascade laser above T = 80 K, Appl. Phys. Lett. 67, 3057–3059 (1995)
C. Gmachl, A. Tredicucci, F. Capasso, A.L. Hutchinson, D.L. Sivco, J. N. Baillargeon, A. Y. Cho: High-power λ ∼ 8 μm quantum cascade laser with near optimum performance, Appl. Phys. Lett. 72, 3130–3132 (1998)
J. Faist, A. Tredicucci, F. Capasso, C. Sirtori, D. L. Sivco, J. N. Baillargeon, A.L. Hutchinson, A.Y. Cho: High-power continuous-wave quantum cascade lasers, IEEE J. Quantum Electron. 34, 336–343 (1998)
C. Sirtori, J. Faist, F. Capasso, D. L. Sivco, A. L. Hutchinson, A. Y. Cho: Pulsed and continuous-wave operation of long wavelength infrared (λ = 9.3 μm) quantum cascade lasers, IEEE J. Quantum Electron. 33, 89–93 (1997)
C. Gmachl, F. Capasso, J. Faist, A. L. Hutchinson, A. Tredicucci, D. L. Sivco, J.N. Baillargeon, S. Chu, A.Y. Cho: Continuous-wave and high-power pulsed operation of index-coupled distributed quantum cascade laser at λ ∼ 8.5 μm, Appl. Phys. Lett. 72, 1430–1432 (1998)
J. Faist, C. Sirtori, F. Capasso, D.L. Sivco, J.N. Baillargeon, A.L. Hutchinson, A.Y. Cho: High-power long-wavelength (λ = 11.5 μm) quantum cascade lasers operating above room temperature, IEEE Photon. Technol. Lett. 10, 1100–1102 (1998)
C. Gmachl, A.M. Sergent, A. Tredicucci, F. Capasso, A.L. Hutchinson, D.L. Sivco, J. N. Baillargeon, S. Chu, A.Y. Cho: Improved CW operation of quantum cascade lasers with epitaxial-side heat-sinking, IEEE Photon. Technol. Lett. 11, 1369–1371 (1999)
J. Faist, C. Gmachl, F. Capasso, C. Sirtori, D.L. Sivco, J.N. Baillargeon, A.Y. Cho: Distributed feedback quantum cascade lasers, Appl. Phys. Lett. 70, 2670–2672 (1997)
C. Gmachl, J. Faist, J. N. Baillargeon, F. Capasso, C. Sirtori, D.L. Sivco, S. Chu, A. Y. Cho: Complex-coupled quantum cascade distributed-feedback laser, IEEE Photon. Technol. Lett. 9, 1090–1092 (1997)
C. Sirtori, P. Kruck, S. Barbieri, P. Collot, J. Nagle, M. Beck, J. Faist, U. Oesterle: GaAs/AlxGa1-xAs quantum cascade lasers, Appl. Phys. Lett. 73, 3486–3488 (1998)
C. Gmachl, F. Capasso, E. Narimanov, J. U. Nöckel, D. Stone, J. Faist, D.L. Sivco, A. Y. Cho: High-power directional emission from microlasers with chaotic resonators, Science 280, 1556–1564 (1998)
C. Gmachl, H. M. Ng, A.Y. Cho: Intersubband absorption in degenerately doped GaN/AlxGa1-xN coupled double quantum wells, Appl. Phys. Lett. 79, 1590–1592 (2001)
D. Hofstetter, L. Diehl, J. Faist, W. J. Schaff, J. Hwang, L.F. Eastman, C. Zellweger: Midinfrared intersubband absorption on AlGaN/GaN-based high-electron-mobility transistors, Appl. Phys. Lett. 80, 2991–2994 (2002)
R. Martini, C. Gmachl, J. Falciglia, F. G. Curti, C. G. Bethea, F. Capasso, E. A. Whittaker, R. Paiella, A. Tredicucci, A.L. Hutchinson, D.L. Sivco, A.Y. Cho: High-speed modulation and free-space optical audio/video transmission using quantum cascade lasers, IEE Electron. Lett. 37, 102–103 (2001)
S. Blaser, D. Hofstetter, M. Beck, J. Faist: Free-space optical data link using Peltier-cooled quantum cascade laser, IEE Electron. Lett. 37, 778–780 (2001)
D. Hofstetter, M. Beck, J. Faist, M. Nägele, M.W. Sigrist: Photoacoustic spec-troscopy with quantum cascade distributed-feedback lasers, Opt. Lett. 26, 887–889 (2001)
B.A. Paldus, T.G. Spence, R.N. Zare, J. Oomens, F. Harren, D.H. Parker, C. Gmachl, F. Capasso, D.L. Sivco, J. N. Baillargeon, A. L. Hutchinson, A.Y. Cho: Photoacoustic spectroscopy using quantum-cascade lasers, Opt. Lett. 24, 178–180 (1999)
B. Ishaug, W. Hwang, J. Um, B. Guo, H. Lee, C. Lin: Continuous-wave operation of a 5.2 μm quantum-cascade laser up to 210 K, Appl. Phys. Lett. 79, 1745–1747 (2001)
D. Hofstetter, M. Beck, T. Aellen, J. Faist, U. Oesterle, M. Ilegems, E. Gini, H. Melchior: Continuous wave operation of a 9.3 μm quantum cascade laser on a Peltier cooler, Appl. Phys. Lett. 78, 1964–1966 (2001)
M. Beck, D. Hofstetter, T. Aellen, J. Faist, U. Oesterle, M. Ilegems, E. Gini, H. Melchior: Continuous-wave operation of a mid-infrared semiconductor laser at room-temperature, Science 295, 301–305 (2002)
H. Page, C. Becker, A. Robertson, G. Glastre, V. Ortiz, C. Sirtori: 300 K operation of a GaAs-based quantum-cascade laser at λ ∼ 9 μm, Appl. Phys. Lett. 75, 3529–3531 (2001)
S. Anders, W. Schrenk, E. Gornik, G. Strasser: Room-temperature emission of GaAs/AlGaAs superlattice quantum-cascade lasers at 12.6 μm, Appl. Phys. Lett. 80, 1864–1866 (2002)
W. Schrenk, N. Finger, S. Gianordoli, L. Hvozdara, G. Strasser, E. Gornik: GaAs/AlGaAs distributed feedback quantum cascade lasers, Appl. Phys. Lett. 76, 253–255 (2000)
R. Köhler, A. Tredicucci, F. Beltram, H.E. Beere, E.H. Linfield, A. Giles, G. Davies, D. A. Ritchie, R. C. Iotti, F. Rossi: Terahertz heterostructure-semiconductor laser, Nature 417, 156–159 (2002)
M. Rochat, L. Ajili, H. Willenberg, J. Faist, H. Beere, G. Davies, E. Linfield, D. Ritchie: Low threshold terahertz quantum cascade lasers, Appl. Phys. Lett. 81, 1381–1383 (2002)
D. Hofstetter, J. Faist, M. Beck, A. Müller, U. Oesterle: Demonstration of high-performance 10.16 μm quantum cascade distributed feedback lasers fabricated without epitaxial regrowth, Appl. Phys. Lett. 75, 665–667 (1999)
G.A. Evans, D.P. Bour, N.W. Carlson, J. M. Hammer, M. Lurie, J.K. Butler, S.L. Palfrey, R. Amantea, L.A. Carr, F. Z. Hawrylo, E. A. James, J. B. Kirk, S.K. Liew, W. F. Reichert: Coherent, monolithic two-dimensional strained In-GaAs/GaAs quantum well laser arrays using grating surface emission, Appl. Phys. Lett. 55, 2721–2723 (1989)
P. Repond, T. Marty, M.W. Sigrist: A continuously tunable CO2 laser for photoacoustic detection of trace gases, Helv. Phys. Acta 65, 828–829 (1992)
M. Nägele, D. Hofstetter, J. Faist, M. W. Sigrist: Low power quantum-cascade laser photoacoustic spectrometer for trace-gas monitoring, Analytical Sci. 17, 497–499 (2001)
P. Hess: Principles of photoacoustic and photothermal detection of gases, in Principles and Perspectives of Photothermal and Photoacoustic Phenomena IV, ed. by A. Mandelis (Elsevier, New-York 1992) Chap. 4
R. Köhler, C. Gmachl, A. Tredicucci, F. Capasso, D.L. Sivco, S. Chu, A. Y. Cho: Single-mode tunable pulsed, and continuous wave quantum-cascade distributed feedback lasers at λ ∼ 4.6-4.7 μm, Appl. Phys. Lett. 76, 1092–1094 (2000)
D. Hofstetter, T. Aellen, M. Beck, J. Faist: High average power first-order distributed feedback quantum cascade lasers, IEEE Photon. Technol. Lett. 12, 1610–1612 (2000)
J. Faist, F. Capasso, D.L. Sivco, A.L. Hutchinson, S. Chu, A.Y. Cho: Short wavelength (λ ∼ 3.4 μm) quantum cascade laser based on strained compensated InGaAs/AlInAs, Appl. Phys. Lett. 72, 680–682 (1998)
G. Scamarcio, F. Capasso, C. Sirtori, J. Faist, A. L. Hutchinson, D. L. Sivco, A.Y. Cho: High-power infrared (8-micrometer wavelength) superlattice lasers, Science 276, 773–776 (1997)
A. Tahraoui, A. Matlis, S. Slivken, J. Diaz, M. Razeghi: High-performance quantum cascade lasers (λ ∼ 11 μm) operating at high temperature (T ≥425 K), Appl. Phys. Lett. 78, 416–418 (2001)
S. Bernegger, M.W. Sigrist: CO-laser photoacoustic spectroscopy of gases and vapours for trace gas analysis, Infrared Phys. 30, 375–429 (1990)
B. Mizaikoff, C.S. Murthy, M. Kraft, V. Pustogow, A. Müller, D. Hofstetter, J. Faist, N. Croitoru: Novel mid-infrared gas sensors based on hollow waveguides and quantum cascade lasers, in Proc. PITTCON 2000 (New Orleans, LA 2000)
R. Kästle, M.W. Sigrist: CO-laser photoacoustic spectroscopy on the dimeriza-tion of fatty acid molecules, J. Phys. IV (Paris) Colloque C7, 491–494 (1994)
A. Müller, M. Beck, J. Faist, U. Oesterle: Electrically tunable, room-temperature quantum-cascade lasers, Appl. Phys. Lett. 75, 1509–1511 (1999)
A. Tredicucci, F. Capasso, C. Gmachl, D. L. Sivco, A. L. Hutchinson, A. Y. Cho: High performance interminiband quantum cascade lasers with graded superlat-tices, Appl. Phys. Lett. 73, 2101–2103 (1998)
D. Hofstetter, M. Beck, T. Aellen, J. Faist: High-temperature operation of distributed feedback quantum-cascade lasers at 5.3 μm, Appl. Phys. Lett. 86, 396–398 (2001)
C. H. Wu, P. S. Zory, M. A. Emanuel: Contact reflectivity effects on thin p-clad InGaAs single quantum-well lasers, IEEE Photon. Technol. Lett. 6, 1427–1429 (1994)
R. L. Thornton, W. J. Mosby, H. F. Chung: Surface skimming buried heter-ostructure laser with applications to optoelectronic integration, Appl. Phys. Lett. 59, 513–515 (1991)
D. Hofstetter, J. Faist, M. Beck, U. Oesterle: Surface-emitting 10.1 μm quantum-cascade distributed feedback lasers, Appl. Phys. Lett. 75, 3769–3771 (1999)
W. Streifer, R. D. Burnham, D.R. Scifres: Radiation losses and longitudinal mode selection in distributed feedback lasers, IEEE J. Quantum Electron. 12, 737–739 (1976)
M. Tacke: New developments and applications of tunable IR lead salt lasers, Infrared Phys. Technol. 36, 447–463 (1995)
G. Springholz, T. Schwarzl, M. Aigle, H. Pascher, W. Heiss: 4.8 μm vertical emitting PbTe quantum-well lasers based on high-finesse EuTe/Pb1-x EuxTe microcavities, Appl. Phys. Lett. 76, 1807–1809 (2000)
A. Olafsson, M. Hammerich, J. Bülow, J. Henningsen: Photoacoustic detection of NH3 in power plant emission with a CO2 laser, Appl. Phys. B 49, 91–97 (1989)
P. Repond, M.W. Sigrist: Continuously tunable high pressure CO2 laser for spectroscopic studies on trace gases, IEEE J. Quantum Electron. 32, 1549–1556 (1996)
D. Richter, D.G. Lancaster, R.F. Curl, W. Neu, F.K. Tittel: Compact mid-infrared trace gas sensor based on difference-frequency generation of two diode lasers in periodically poled LiNbO3, Appl. Phys. B 67, 347–349 (1998)
R. Paiella, F. Capasso, C. Gmachl, D. L. Sivco, J. N. Baillargeon, A. L. Hutchinson, A.Y. Cho, H. C. Liu: Self-mode-locking of quantum cascade lasers with giant ultrafast optical nonlinearities, Science 290, 1739–1742 (2000)
D. Herriot, H. Kogelnik, R. Kompner: Off-axis paths in spherical mirror interferometers, Appl. Opt. 3, 523–525 (1964)
A. Karbach, P. Hess: Photoacoustic signal in a cylindrical resonator: Theory and laser experiments for CH4 and C2H6, J. Chem. Phys. 84, 2945–2967 (1986)
M. Beck, J. Faist, U. Oesterle, M. Ilegems, E. Gini, H. Melchior: Buried heter-ostructure quantum cascade lasers with a large optical cavity waveguide, IEEE Photon. Technol. Lett. 12, 1450–1452 (2000)
N. Mustafa, L. Pesquera, C. Cheung, K.A. Stone: Terahertz bandwidth prediction for amplitude modulation response of unipolar intersubband semiconductor lasers, IEEE Photon. Technol. Lett. 11, 527–529 (1999)
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2003 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Hofstetter, D., Faist, J. (2003). High Performance Quantum Cascade Lasers and Their Applications. In: Sorokina, I.T., Vodopyanov, K.L. (eds) Solid-State Mid-Infrared Laser Sources. Topics in Applied Physics, vol 89. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-36491-9_2
Download citation
DOI: https://doi.org/10.1007/3-540-36491-9_2
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-00621-3
Online ISBN: 978-3-540-36491-7
eBook Packages: Springer Book Archive